鉭酸鋰(LiTaO3)晶體是一種優良的多功能材料,具有很高的應用價值。LiTaO3晶體以它的化學性能穩定高(不溶與水),居里點高于600℃,不易出現退極化現象,介電損耗低,探測率優值高的優良特性,成為熱釋電紅外探測器應用材料的最佳選擇。經過拋光的LT晶片廣泛用于諧振器、濾波器、換能器等電子通訊器件的制造,尤其以它良好的機電耦合、溫度系數等綜合性能而被用于制造高頻聲表面波器件,并應用在手機、對講機、衛星通訊、航空航天等許多高端通訊領域。
Material | Optical Grade (White or Black) | SAW Grade (White or Black) | LiTaO3 wafers (White or Black &Fe doped) |
Curie Temp | 603±2℃ | 1142±0.7℃ |
Cutting Angle | X/Y/Z etc | X/Y/Z/X112Y/Y36/Y42/Y48/etc | X/Y/Z/X112Y/Y36/Y42/Y48/etc |
Diameter/size | 2”/3”/4” LT wafer | 3”/4”/6" LT wafer | 3”/4”/6" LT wafer |
Tol(±) | <0.20 mm
| <0.20 mm ±0.005mm |
Thickness | 0.18 ~ 0.5mm or more
|
Primary Flat
| 16mm/22mm /32mm /42.5mm /57.5mm |
TTV
| <3μm
|
Bow | -30<bow<30
|
Warp | <40μm
|
Orientation Flat
| All available
|
Surface Type
| Single Side Polished(SSP) /Double Sides Polished(DSP)
|
Polished side Ra
| <0.5nm
|
Back Side Criteria
| General is 0.2-0.5μm or as customized |
S/D | 40/20 or 20/10
|
Edge Criteria | R=0.2mm or Bullnose
|
Optical doped
| Zn/MgO etc |
| Fe doped for saw grade LN< wafers |
Transmissivity |
| general:5.9x10-11<s<2.0*10-10 at 25℃ | general:5.9x10-11<s<2.0*10-10 at 25℃ |
Wafer Surface Criteria | Contamination | None
|
Particles ¢>0.3 μm
| <= 30 |
Scratch , Chipping
| None |
Defect | No edge cracks, scratches, saw marks, stains |